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BS 07/30148822 DC
BS 07/30148822 DC BS IEC 62047-4. Semiconductor devices. Micro-electromechanical devices. Part 4. Generic specifications for MEMS
standard by BSI Group, 05/10/2007
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M00019806
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Cross References: IEC 60027*IEC 60068-2*IEC 60410*IEC 60617-DB-12M*IEC 60721-2-1*IEC 60721-3-0*IEC 60721-3-0/Amd1:1987*IEC 60721-3-1*IEC 60747-1:2006 *IEC 62047-1*IEC 60749*IEC 60617*ISO 1000*ISO 2859*IEC 60617*
