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IEC 60050-523 Ed. 1.0 b:2018

IEC 60050-523 Ed. 1.0 b:2018 International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices

standard by International Electrotechnical Commission, 12/06/2018

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IEC 60050-523:2018 gives the general terminology used for micro-electromechanical devices including the process of production of such devices.

 
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