Full Description

ISO 11952:2019 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

This document has the following objectives:

to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;

to define the minimum requirements for the calibration process and the conditions of acceptance;

to ascertain the instrument's ability to be calibrated (assignment of a calibrate-ability category to the instrument);

to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);

to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;

to define the requirements for reporting results.